Instrument Technology Research Center (ITRC) is a subdivision of NARLabs, a government funded research institute pioneering in instrument related frontier researches foreseen by the nation, Its long-term prospect is to advance national science competence and to improve the quality of lives for the public.

The stepper using in lithography process of Taiwanese semiconductor companies is mainly come from the Netherlands and Japan, as well as the costly after-sale service. ITRC possesses the high-end optical mechanical technology, which help them to develop the key components beam shaping glasses, quartz fiber optic light guides, Wafer Chuck, Elevation Pin, E-Pin, i-line filter and polarization spectroscope, and high expansion micro beam expander. All the above key componets have been exhibited in SEMICON Taiwan 2014.

Having above key componets help Taiwanese instrument and equipment firms provide steppers' maintenance service, which reduces cost of semiconductor firms.

SEMICON Taiwan 2014 is expected to be the largest ever in its 19-year history, featuring 1,340 booths and reaching over 40,000 attendees and exhibitors at the Taipei Nangang Exhibition Hall from September 3 to 5.