Technology Front
New Products and Features to the CB RF Power Supply Family
Published: Jul 01,201420 Read
Comdel, Inc., a leader in RF power supplies and DC generators, has incorporated 20 years of expertise with the CX Series into the CB line of RF generators While Comdel’s existing CX series of RF generators is known as the standard of reliability for the industry, the new CB600A products take innovation to the next level with design and performance.
The CB600A products still include the same proven power amplifier section as the CX series, but are designed for volume manufacturing and features a smaller, lighter packaging design. No other solid state amplifier has performed more reliably in the harsh environment of the semiconductor plasma processing.
RF generators from the CB product family are designed for high frequency applications, available in power ranges from 50 to 5,000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership.
The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, Reactive Ion Etch (RIE), parallel plate, Inductively Coupled Plasma (ICP), RF sputtering, Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD), as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
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