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Teledyne DALSA Announces Electrostatic Actuator IC for MEMS Micro-Mirror Systems

By Vincent Wang
Published: Mar 04,2014

AIPEI, Taiwan — Teledyne DALSA’s Semiconductor Foundry, a division of Teledyne Technologies, announced the availability of its DH0485AQ Electrostatic Actuator High Voltage IC. Using proprietary CMOS/DMOS technology, the DH0485AQ’s high accuracy, small footprint and low power is designed for portable systems containing MEMS Micro-Mirrors with up to 4 electrodes.

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This device showcases Teledyne DALSA Semiconductor's suite of product development and manufacturing capabilities for MEMS/CCD/HV-CMOS solutions required by ROADM, WSS, OXC and Integrable Tunable Lasers.

“Sophisticated High Voltage design permits us to electrostatically actuate one bi-axial or two uni-axial MEMS Micro-Mirrors up to 240V,“” said Remi Meingan, Senior Product Manager.

“With an internal DC to DC Boost Converter, 16 Bit DAC with SPI Interface and advanced QFN Package, the DH0485AQ is ideal for optical applications using MEMS Micro-Mirrors with 4 electrodes and needing accurate positioning.”

The DH0485AQ provides a cost-effective solution for Optical MEMS. The DH0485AQ requires a low voltage supply; the High Voltage Output is provided through a DC/DC Boost Converter up to 240V using an external miniaturized surface mount coil. The DH0485AQ is packaged in QFN 33L, 6x6mm, 0.5P and is ROHS compliant.

Key Features including four independent 16-bit HV Amplifiers up to 240V, 2-bit voltage selector pins allowing 90, 115, 170 and 240V outputs, via a DC/DC step-up converter and internal loop gain, standard SPI/3-wire serial interface for DAC programming up to 50MHz, low pass filter to avoid resonance frequency of MEMS, low noise, and internal diode for temperature monitoring.

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