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TSMC Collaborates with ITRC in Development of ALD Equipment

By Korbin Lan
Published: Mar 05,2015

TAIPEI, Taiwan - TSMC Wednesday signed a cooperation agreement with Taiwan Instrument Technology Research Center (ITRC) in development of Atomic Layer Deposition(ALD) equipment, to elevate the ability of localizing semiconductor equipment.

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ITRC, a government funded research institute in instrument related frontier researches foreseen by the nation, unveiled its Atomic Layer Deposition(ALD) Joint Laboratory. TSMC, Tsinghua University, Huwei University of Technology, Hermes-Epitek, Hermes Microvision and AIBT all attended the opening ceremony.

Qi Zhen-Ying, vice president of ITRC, and Sun Yuan-cheng, deputy general manager of TSMC, signed a cooperation agreement. The two sides will work together at the ALD Joint Laboratory with industry and academia.

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